| 摘要 |
PURPOSE: A nobinite alloy composition for low thermal expansion is provided to be used as a probe card holder for semiconductor equipment by controlling the content of nickel, carbon, silicon, and manganese. CONSTITUTION: A nobinite alloy composition for low thermal expansion is composed of iron 50~60 weight%, nickel 30~40 weight%, carbon 2~4 weight%, silicon 1~5 weight%, cobalt 2~7 weight, manganese less than 2.0 weight%, phosphorus less than 2.0 weight%, sulfur less than 2.0 weight%, and inevitable impurities. The content of nickel is controlled to be less than 40% by preventing a hardness value from being declined. A thermal expansion coefficient can be increased by adding carbon 2 weight%. The content of manganese is controlled to be less than 2.0 weight% by preventing a linear expansion coefficient from being drastically increased. |
