AIR BEARING AND METHOD FOR CONTROLLING THEREOF

摘要

PURPOSE: An air bearing and a method for controlling the same are provided to have uniform motion variables for speed, acceleration, and weight by controlling air pressure supplied to an air bearing. CONSTITUTION: An air bearing(100) includes a bearing body(110), the first and second adjusting values(120,130), and a controller(140). The bearing body comprises the first and second spray holes(111,112). The first and second spray holes spray air to a motion side of a counterpart respectively. The first and second adjusting valves adjust pressure of air supplied to the first and second spray holes. The controller controls the first and second adjusting valves according to a motion variable of a transfer body. The controller controls pressure of air supplied to the first and second spray holes.