Sensor protection

摘要

In a method for manufacturing a sensor chip a spacer (3) is arranged at the front side (11) of a substrate (1) at which front side (11) a sensing element (2) is arranged, too. Holes (14) are etched for building vias (15) extending through the substrate (1) between the front side (11) of the substrate (1) and its back side (12). After etching, the holes (14) are filled with conductive material to complete the vias (15). The spacer (3) provides protection to the sensing element (2) and the sensing chip throughout the manufacturing process.

主权项

1. Method for manufacturing a sensor chip, comprising the steps of
providing a substrate with a front side and a back side, arranging a sensing element at the front side, arranging a spacer at the front side, etching holes into the substrate, and filling the holes with a conducting material for building vias extending through the substrate between the front side and the back side, wherein the sensor chip is arranged on a chuck with the spacer facing the chuck for electrically contacting contact pads arranged at the back side with electrodes, wherein the substrate is provided in form of a wafer for building multiple sensor chips from, and wherein sensing elements and conductors for multiple sensor chips are arranged at the front side of the wafer, wherein multiple spacers for multiple sensor chips are arranged at the front side of the wafer, wherein the step of etching holes through the wafer and filling the holes for building vias for multiple sensor chips is applied prior to or after the spacers are arranged at the wafer, and wherein the previous four steps are implemented prior to separating the wafer into multiple sensor chips.