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发明名称
EIN VERFAHREN ZUM ERZEUGEN EINER HOHLEN STRUKTUR AUS EINER SILIZIUM-STRUKTUR
摘要
申请公布号
AT493368(T)
申请公布日期
2011.01.15
申请号
AT20020707133T
申请日期
2002.03.22
申请人
KABUSHIKI KAISHA TOYOTA CHUO KENKYUSHO
发明人
SHIMAOKA, KEIICHI;SAKATA, JIRO;MIZUNO TAKANORI;OKUDA, KATSUHARU;MATSUI, MASAYUKI;SUZUKI, YASUHIKO
分类号
B81C1/00;B81B3/00;H01L21/00;H01L21/302
主分类号
B81C1/00
代理机构
代理人
主权项
地址
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