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发明名称
MAGNETRON-SPUTTERANLAGE
摘要
申请公布号
AT492025(T)
申请公布日期
2011.01.15
申请号
AT20050255082T
申请日期
2005.08.17
申请人
JDS UNIPHASE CORPORATION
发明人
TILSCH, MARKUS K.;SEDDON, RICHARD I.;OCKENFUSS, GEORG J.;HAYES, JEREMY;KLINGER, ROBERT E.
分类号
H01J37/34;C23C14/35
主分类号
H01J37/34
代理机构
代理人
主权项
地址
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