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经营范围
发明名称
VERFAHREN ZUR POSITIONIERUNG EINES WAFERS
摘要
申请公布号
AT493757(T)
申请公布日期
2011.01.15
申请号
AT20060700022T
申请日期
2006.01.09
申请人
OC OERLIKON BALZERS AG
发明人
SCHOLTE VAN MAST, BART;CHRIST, HOLGER;SCHMUCKI, RUEDI
分类号
H01L21/68;H01L21/00
主分类号
H01L21/68
代理机构
代理人
主权项
地址
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