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发明名称
VERFAHREN ZUM ABSCHEIDEN VON SCHICHTEN IN EINEM CVD-REAKTOR SOWIE GASEINLASSORGAN FÜR EINEN CVD- REAKTOR
摘要
申请公布号
AT493521(T)
申请公布日期
2011.01.15
申请号
AT20060830060T
申请日期
2006.11.21
申请人
AIXTRON AG
发明人
KAEPPELER, JOHANNES
分类号
C23C16/455
主分类号
C23C16/455
代理机构
代理人
主权项
地址
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