SINTERING PROCESS FOR HIGH DENSITY CERAMIC SUBSTRATE

摘要

SINTERING PROCESS FOR HIGH DENSITY CERAMIC SUBSTRATE I ABSTRACT 5 A SINTERING PROCESS FOR HIGH DENSITY CERAMIC SUBSTRATE IS DISCLOSED. THE PROCESS INCLUDES THE STEP OF (I) FIRING THE ALUMINA GREEN TAPE AT A TEMPERATURE RANGING FROM 320'C TO 380'C TO REMOVE ORGANIC BINDER CONTAINED IN THE ALUMINA GREEN; (II) SINTERING PRODUCT OF (I) AT SAID TEMPERATURE FOR ABOUT 20-40 MINUTE; (III) SINTERING FTIRTHER RAT A TEMPERATURE RANGING FROM 1200 TO 1500 TO REMOVE PORES BETWEEN I 0 STARTING MATERIAL FORMING THE ALUMINA GREEN TAPE TO PRODUCE HIGH DENSITY CERAMIC WITH A SUBSTRATE DENSITY OF ABOUT 80FROM THE STANDARD VALUE. (FIG. 1) 1 5 '20()47111 2 6