APPARATUS FOR FORMING THIN FILM CAPABLE OF THE CONSECUTIVE PROCESSING AND THE DEPOSITION METHOD BY USING THEMSELVES

摘要

PURPOSE: A continuously processing thin film forming apparatus and a thin film forming method using the same are processing block a processing chamber in case of the operating of an unwinding chamber or a winding chamber by separating the processing chamber, the unwinding chamber, and the winding chamber. CONSTITUTION: An unwinding chamber(10) continuously supplies substrates(S) to a processing chamber(30). The processing chamber forms thin films on the substrates supplied from the supplying roll of the unwinding chamber. A winding chamber(50) includes a winding roll(55) winding the substrate supplied from the processing chamber. A substrate holding unit continuously supplies the substrates to adjacent chambers.