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经营范围
发明名称
APPARATUS FOR INSPECTING SUBSTRATE SURFACE USING STEAM
摘要
申请公布号
KR101008338(B1)
申请公布日期
2011.01.14
申请号
KR20080025991
申请日期
2008.03.20
申请人
发明人
分类号
G02F1/13
主分类号
G02F1/13
代理机构
代理人
主权项
地址
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