APPARATUS AND METHOD OF CORRECTING PLANARITY BETWEEN PROB CARD AND CHUCK PLATE,申请号KR20080081326-传众专利搜索

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发明名称	APPARATUS AND METHOD OF CORRECTING PLANARITY BETWEEN PROB CARD AND CHUCK PLATE
摘要
申请公布号	KR101007871(B1)	申请公布日期	2011.01.14
申请号	KR20080081326	申请日期	2008.08.20
申请人		发明人
分类号	H01L21/66;G01R1/067	主分类号	H01L21/66
代理机构		代理人
主权项
地址

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