| 摘要 |
PROBLEM TO BE SOLVED: To provide a polishing device reducing the separation of a slurry.SOLUTION: The polishing device performing polishing with use of a slurry (2), which is a fluid including grinding particles, includes: a slurry feeding source (3) feeding the slurry (2); a polishing section (13) performing polishing; pipes (4, 8) feeding the slurry (2) from the slurry feeding source (3) to the polishing section (13); a force feed cylinder (5) force feeding the slurry (2); a part valve (9) blocking the current between the pipes (4, 8) and the polishing section (13); and flow reversing means (11) reversing a flow of the fluid in the pipes (4, 8). The flow reversing means (11) discharges the slurry (2) in the pipes (4, 8) to the outside of the pipes (4, 8) by reversing the flow of the fluid in the pipes (4, 8) while the part valve (9) is shut. |
