| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a solar cell with high photoelectric conversion efficiency by easily forming an impurity diffusion layer on one of sides of a semiconductor substrate.SOLUTION: In the method of manufacturing the solar cell, at least one semiconductor substrate and at least one diffusion preventing plate are arranged back to back and first back-to-back diffusion to diffuse impurities is performed. Furthermore, at least one semiconductor substrate and at least one diffusion preventing plate are arranged back to back and after the first back-to-back diffusion is performed, surfaces of the semiconductor substrates from which impurities are diffused are arranged back to back and second back-to-back diffusion is performed. Furthermore, by using the diffusion preventing plate as a semiconductor substrate, an impurity diffusion layer is formed. Moreover, by diffusing impurities of the same conduction types in the first and second impurity diffusion, an impurity diffusion layer is formed. According to the method, the impurity diffusion layer can be formed only on one of sides of the semiconductor substrate by performing impurity diffusion once, and therefore, it is possible to manufacture a solar cell which can be manufactured easily and has high photoelectric conversion efficiency. |
