| 摘要 |
PROBLEM TO BE SOLVED: To provide a technology that can accurately determine the flowing-down state of liquid through image processing without providing a member not directly related to the processing.SOLUTION: A substrate processing apparatus photographs an image including an area B1 on a top face of a substrate W overlapping with a flowing-down path of a liquid Lq extending from a nozzle 43 to the top face of the substrate W, and an image including an area B2 not overlapping with the flowing-down path, and when a difference in a first image area B1 between the images photographed respectively in a first time and a second time different from each other is larger than a predetermined first threshold, and a difference in a second image area B1 between the images photographed respectively in the first time and the second time is smaller than a predetermined second threshold, determines that the flowing-down state of the liquid has been changed between the first time and the second time.SELECTED DRAWING: Figure 7 |
