发明名称 SEMICONDUCTOR DEVICE
摘要 A semiconductor device according to one embodiment includes: a semiconductor substrate; an insulating film provided on the semiconductor substrate and containing a wiring trench; a first catalyst layer provided directly or via another member on side and bottom surfaces of the wiring trench; and a first graphene layer provided in the wiring trench so as to be along the side and bottom surface of the wiring trench, the first graphene layer being provided on the first catalyst layer so as to be in contact with the first catalyst layer.
申请公布号 US2011006425(A1) 申请公布日期 2011.01.13
申请号 US20100726520 申请日期 2010.03.18
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 WADA MAKOTO;MATSUNAGA NORIAKI;AKIMOTO YOSUKE
分类号 H01L23/532 主分类号 H01L23/532
代理机构 代理人
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