摘要 |
A method and apparatus for forming solar cells is provided. In one embodiment, a photovoltaic device includes a first TCO layer disposed on a substrate, a second TCO layer disposed on the first TCO layer, and a p-type silicon containing layer formed on the second TCO layer. In another embodiment, a method of forming a photovoltaic device includes forming a first TCO layer on a substrate, forming a second TCO layer on the first TCO layer, and forming a first p-i-n junction on the second TCO layer. |
申请人 |
APPLIED MATERIALS, INC.;SHENG, SHURAN;CHAE, YONG KEE;KLEIN, STEFAN;AL-BAYATI, AMIR;KUMAR, BHASKAR |
发明人 |
SHENG, SHURAN;CHAE, YONG KEE;KLEIN, STEFAN;AL-BAYATI, AMIR;KUMAR, BHASKAR |