METHOD, SYSTEM AND PROGRAM FOR CREATING EMISSION IMAGE OF INTEGRATED CIRCUIT

摘要

PROBLEM TO BE SOLVED: To disclose a method, system and computer program for creating an image from a device.SOLUTION: The method comprises the steps of: acquiring first and second images from the device, the first and second images having overlapping portions; and estimating the overlapping portions to obtain an approximate shift amount to align approximately the first and second images. This method further comprises the steps of: analyzing the overlapping portions using a defined cross-correlation algorithm to calculate a precise shift amount to align the first and second images; and using the precise shift amount to join the first and second images together. In one embodiment, an optical system is used to acquire the images, a stage is used to move either the device or the optical system to acquire the first and second images, and the estimating step includes using movement of the stage to estimate the overlapping areas.