| 摘要 |
PROBLEM TO BE SOLVED: To provide a high reliability surface-emitting laser technique, wherein even a surface-emitting laser having a thin contact layer around 20 nm prevents increase of contact resistance and a blackening phenomenon, has low resistance and stable characteristics, and never causes degradation of output with time.SOLUTION: This method of manufacturing a surface-emitting laser includes processes of: forming a laminated film comprising a lower semiconductor multilayer film reflecting mirror, a lower spacer layer, an active layer, an upper spacer layer, an upper multilayer film reflecting mirror and a contact layer on a compound semiconductor substrate; forming a first protective layer doubling as a mesa forming mask on the laminated film; processing the laminated film and the first protective film into a mesa structure by etching; forming a second protective film on the mesa structure; leaving the first and second protective films in a light emission part and exposing the contact layer by etching and removing a part thereof contacting an electrode; and forming an upper electrode to be connected to the exposed contact layer and forming a lower electrode on the back side of the compound semiconductor substrate. |
