| 摘要 |
PROBLEM TO BE SOLVED: To provide an adapter unit built-in type loader chamber which is adaptive to non-automatic transfer and automatic transfer of a body to be inspected, without performing a switching operation between a container such as a cassette and an adapter unit like before.SOLUTION: The loader chamber 10 is equipped with an adapter unit, which is provided corresponding to an RGV (Rail Guided Vehicle) 40 configured to automatically transfer a semiconductor wafer W to a buffer table arrangement portion 13 different from a cassette mounting portion 11, and which holds a plurality of semiconductor wafers W transferred between the RGV 40 and a prober chamber 20. |
