| 摘要 |
PROBLEM TO BE SOLVED: To provide a molecular pump containing a screw groove pump part which has a structure capable of keeping temperature of a stator in the screw groove pump part at a prescribed high temperature, preventing process gas having an adhesion/coagulation property in exhaust gas from adhering on an exhaust gas passage in the molecular pump, preventing heat of exhaust gas from being transmitted to a base part of the molecular pump or the like and shortening the length of the molecular pump.SOLUTION: A molecular pump 1 which includes a screw groove pump part 3 having a stator 3a on the outside of a rotor 4b of the screw groove pump part so as to be erected on a base part 8, interposes a cylindrical exhaust gas chamber 6c between the stator 3a and a casing 5 encircling the screw groove pump part 3, and contains an exhaust port 5a in a sidewall part 5c of the casing 5. Exhaust gas in the screw groove pump part 3 communicates to the exhaust port 5a through the medium of the exhaust gas chamber 6c. |
