| 摘要 |
PROBLEM TO BE SOLVED: To provide an extension method of adhesive tape that can sufficiently extend the gap between chips over an overall workpiece.SOLUTION: The extension method comprises an ultraviolet ray irradiation step of irradiating an adhesive tape (19) attached to a workpiece (11) with ultraviolet ray to promote hardening of the adhesive tape, and an extending step of extending the adhesive tape around the workpiece and forming a gap between adjacent chips (21) after the ultraviolet ray irradiation step. In the ultraviolet ray irradiation step, ultraviolet ray is applied to an annular area (19a) of the adhesive tape which corresponds to the peripheral edge portion of the workpiece so that the integrated light amount of the ultraviolet ray is larger than that in a center area (19b) surrounded by the annular area, thereby promoting hardening of the annular area, whereby the gap between the chips formed in the extension step is made uniform over the whole workpiece.SELECTED DRAWING: Figure 4 |
