SURFACE STATE INSPECTION APPARATUS USING PHOTOELECTRIC EFFECT

摘要

PROBLEM TO BE SOLVED: To provide a surface state inspection apparatus using the photoelectric effect and capable of acquiring temporally stable OSEE signals.SOLUTION: The surface state inspection apparatus includes: an ultraviolet generating source for generating ultraviolet light; a photoelectron collecting part for collecting photoelectrons discharged from the surface of metal by the irradiation of ultraviolet light; an amplification part for amplifying a photocurrent acquired from the photoelectron collecting part; and a band passing means for passing only a spectral component in a region in the vicinity of 185 nm among ultraviolet light generated by the ultraviolet generating source and is constituted in such a way as to irradiate ultraviolet light passed through the band passing means to the surface of metal to be inspected.