| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas analyzer for enabling a stable measurement for a long time, even if contamination is mixed in a measurement gas.SOLUTION: The gas analyzer includes: an outer pipe having an inner circumference finished like a mirror; an inner pipe formed with a plurality of through-holes at predetermined positions, and disposed and separated from the inner circumference of the outer pipe so as to maintain a regular interval; a purge gas introduction port and a purge gas discharge port formed in the outer pipe; a laser emitting means for emitting a laser light within the inner pipe; and a light receiving means for receiving the light as the laser light emitted within the inner pipe and reflected by a surface finished like the mirror. |
