| 摘要 |
PROBLEM TO BE SOLVED: To continuously perform film-forming of a release agent for a plurality of templates.SOLUTION: A template processor 1 is configured by integrally connecting a template carrying in and out station 2 with a processing station 3. The template carrying in and out station 2 retains a plurality of templates T and carries i and out a template T for the processing station 3. The processing station 3 is provided with a plurality of conveyance-rollers which convey the template T along a conveyance line A. On the conveyance line A, a cleaning unit 21, a coating unit 22, a heating unit 23, a temperature control unit 24, and a rinse unit 25, which perform prescribed processing for the template T during conveyance, are arranged in this order, in the conveyance direction of the template T. |
