TEMPLATE PROCESSOR, IMPRINT SYSTEM, RELEASE AGENT PROCESSING METHOD, PROGRAM AND COMPUTER STORAGE MEDIUM

摘要

PROBLEM TO BE SOLVED: To properly form a release agent on the surface of a template.SOLUTION: A template processor 1 is configured by integrally connecting a template carrying in and out station 2 with a processing station 3. The template carrying in and out station 2 retains a plurality of templates T and carries in and out a template T for the processing station 3. The processing station 3 has a conveyance unit 20 and conveys the template T to respective kinds of processing units arranged in processing blocks G1 to G4. The processing blocks G1 to G4 perform film forming of the release agent onto the surface of the template T. The processing blocks G1, G2 respectively have release agent reforming units which weaken a release effect of UV rays by irradiating the release agent on an outer area of the template T with the UV rays.