| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas purge unit capable of preventing particles from winding-up, when introducing a purge gas.SOLUTION: A gas purge unit for introducing a purification gas into a container (2) having a main opening (2b) for loading and unloading a housed material, from the main opening, has a cylindrical blowoff member (22) where a long cavity (23) extending in the longitudinal direction and supplied with the purification gas from a supply section, and a plurality of discharge paths (26) arranged in the longitudinal direction and discharging the purification gas in a direction crossing the longitudinal direction by interconnecting the long cavity and the outside are formed internally. The opening area A2 of an opening (26b) to the outside is larger than the opening area A1 of an opening (26a) to the long cavity of discharge paths.SELECTED DRAWING: Figure 5 |
