| 摘要 |
<p>PURPOSE: A method for manufacturing photo-electromotive apparatus is provided to form a light receiving layer including a plurality of layers by controlling the flow rate of source gas. CONSTITUTION: A first electrode is formed on the upper side of a substrate. One or more photoelectric transformation layers including a light receiving layer are formed on the first electrode. A second electrode is formed on the photoelectric transformation layers. The flow rate of silane supplied to a chamber is constant while the light receiving layer is being formed. The flow rate of source gas containing non-sillicon-based elements is changed according to deposition time.</p> |
