| 摘要 |
PROBLEM TO BE SOLVED: To prevent a projecting-shape part from being collapsed, even in the case that an object to be processed including an inorganic film and a film (such as a metal film and an organic film) different in property from the inorganic film, laminated to each other, is processed.SOLUTION: A liquid processing apparatus processes the object to be processed W including a body part Wand a plurality of projecting-shape parts Wdisposed on the body part W, with the inorganic film and a different film different in property from the inorganic film being laminated to each other. The liquid processing apparatus includes: a support part 50 configured to support the body part Wof the object to be processed W; a hydrophobic-liquid supply mechanism 30 configured to supply a hydrophobic liquid to the object to be processed W supported by the support part 50; and a rinse-liquid supply part 22 configured to supply a rinse liquid to the object to be processed W to which the hydrophobic liquid has been supplied by the hydrophobic-liquid supply mechanism 30. The hydrophobic-liquid supply mechanism 30 includes: a first hydrophobic-liquid supply part 32 configured to supply a first hydrophobic liquid for making hydrophobic the inorganic film to the object to be processed W; and a second hydrophobic-liquid supply part 37 configured to supply a second hydrophobic liquid for making hydrophobic the different film to the object to be processed W. |
