发明名称 Equal-Path Interferometer
摘要 An optical assembly for use in an interferometer is provided. The optical assembly includes first and second partially reflective surfaces positioned along an optical axis and oriented at different non-normal angles to the optical axis. The second partially reflective surface is configured to receive light transmitted through the first partially reflective surface along the optical path, transmit a portion of the received light to a test object to define measurement light for the interferometer and reflect another portion of the received light back towards the first partially reflective surface to define reference light for the interferometer. The reference light makes at least one round trip path between the second and first partially reflective surfaces.
申请公布号 US2011007323(A1) 申请公布日期 2011.01.13
申请号 US20100818753 申请日期 2010.06.18
申请人 ZYGO CORPORATION 发明人 DE GROOT PETER J.;DECK LESLIE L.;BIEGEN JAMES F.;KOLIOPOULOS CHRIS
分类号 G01B9/02 主分类号 G01B9/02
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