| 摘要 |
There is described an EHID lamp that comprises a field applicator, a means for coupling RF power to the field applicator, and a discharge vessel; the discharge vessel being disposed within the field applicator and containing a discharge medium; the field applicator being comprised of a solid, transparent or translucent dielectric material and having an optical control surface and a conductive coating that substantially covers its external surfaces. By combining functions served by otherwise individual components, the EHID lamp of this invention has the potential for reducing parts count, improving RF coupling to the plasma, reducing shadowing, and improving reliability. |
