METHOD AND SYSTEM FOR PRODUCING MONOSILANE

摘要

The invention relates to a system for producing monosilane, comprising a reaction column (100) having a feed pipe (101) for trichlorosilane and a discharge pipe (102) for silicon tetrachloride that develops, and at least one condenser (103), by way of which the produced monosilane can be removed from the reaction column, wherein the reaction column comprises at least two reactive/distillative reaction regions (104, 105), which are operated at different temperatures and contain different catalytically acting solids. Furthermore a method for producing monosilane by the catalytic disproportioning of trichlorosilane is described, wherein the disproportioning is carried out in at least two reactive/distillative reaction regions (104, 105) operated at different temperatures and containing different catalytically acting solids.