Driver for MEMS spatial light modulator

摘要

A spatial light modulator (SLM) module and methods of designing, manufacturing and using the same are provided. In one embodiment, the SLM module comprises a diffractive, diffractive SLM formed on a substrate, the SLM including a plurality of pixels each including a plurality of electrostatically deflectable actuators, and a driver including a number of drive channels each coupled to one of the plurality of electrostatically deflectable actuators. Each of the drive channels include at least one internal digital-to-analog converter (DAC) integrally formed on the same substrate as the SLM. In one embodiment, the DAC is a multi-slope charge integrating DAC. In other embodiments, the driver includes circuitry to test each of the drive channels, and a spare drive channel that can be switched in to replace a defective drive channel.

主权项

1. An apparatus comprising:
a diffractive spatial light modulator (SLM) formed on a substrate, the SLM including a plurality of pixels each including a plurality of electrostatically deflectable actuators; and a driver including a number of drive channels each coupled to one of the plurality of electrostatically deflectable actuators, each of the drive channels including at least one internal digital-to-analog converter (DAC) integrally formed on the same substrate as the SLM and adapted to receive a multi-bit DAC word, wherein the multi-bit DAC word comprises 10 bits, including 6 most significant bits (MSBs) and 4 least significant bits (LSBs), and wherein the at least one internal DAC comprises a charge integrating DAC in which a change in an output of the charge integrating DAC per clock cycle is 8 times greater for the MSBs than for the LSBs.