FLANGE MEMBER FOR ULTRAVIOLET IRRADIATION APPARATUS AND ULTRAVIOLET IRRADIATION APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a flange member for an ultraviolet irradiation apparatus and the ultraviolet irradiation apparatus which eliminate the need of a complicated constitution such as a rotational mechanism for rotating a workpiece and allow uniform treatment to be performed on the whole surface of the workpiece, in the irradiation of the workpiece with ultraviolet rays while supplying a process gas.SOLUTION: The flange member 20 includes a window member supporting part 524 and a process gas guiding part. The process gas guiding part comprises: a groove 520 formed on a lower flange plate 52 on the periphery of each window member supporting part 524; a plurality of process gas spouts 522 formed vertically to communicate the groove 520 with the inside of a treatment chamber 14; and an introduction hole 542 which is arranged on an upper flange plate 54 and used for introducing the process gas, which is introduced from a gas supply unit 22, into the groove 520.