| 摘要 |
PROBLEM TO BE SOLVED: To provide a salt forming a pattern of excellent resolution, shape and line-edge roughness, and a resist composition or the like containing the salt.SOLUTION: The salt is represented by formula (I-BB). In the formula, Qand Qeach represents a fluorine atom or a perfluoroalkyl group; Xrepresents a single bond or -[CH]-, provided that k is an integer of 1-17; Yrepresents an aliphatic hydrocarbon group, an alicyclic hydrocarbon group, or an aromatic hydrocarbon group; Aand Aeach represents an aliphatic hydrocarbon group, an alicyclic hydrocarbon group or an aromatic hydrocarbon group, provided that Aand Atogether may form a ring; Arrepresents a (m+1)-valent aromatic hydrocarbon group; Brepresents a single bond or an alkylene group; Brepresents a group that cannot be eliminated by the action of an acid, and is an alicyclic hydrocarbon group comprising an -OXgroup; Xrepresents a hydrogen atom, or a group that can be eliminated by the action of an acid; and mand meach represents an integer of 0-2, mrepresents an integer of 1-3, and mrepresents an integer of 1-3. |
