发明名称 GROUP III NITRIDE SEMICONDUCTOR LIGHT-EMITTING ELEMENT AND MANUFACTURING METHOD THEREOF
摘要 PROBLEM TO BE SOLVED: To improve optical taking-out efficiency of a group III nitride semiconductor light-emitting element.SOLUTION: Dot-like grooves 108 are formed in a region with no n-electrode 107 on the n-electrode 107 side surface of an n-type layer 106 in a light-emitting element 100. The groove 108 penetrates the n-type layer, an active layer, and a p-type layer and has a depth reaching an etching stopper layer 109. The grooves 108 are arranged in matrix in the region where no n-electrode 107 is formed. The light incident on the side surface of the groove 108 is efficiently radiated outside, and optical taking-out efficiency is improved with the configuration of the light-emitting element 100.
申请公布号 JP2011009386(A) 申请公布日期 2011.01.13
申请号 JP20090150341 申请日期 2009.06.24
申请人 TOYODA GOSEI CO LTD 发明人 KAMIMURA TOSHIYA;ARAZOE NAOKI
分类号 H01L33/22;H01L33/32 主分类号 H01L33/22
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