| 摘要 |
PROBLEM TO BE SOLVED: To provide a defect marking device for a film and a defect marking method capable of reducing man-hours for visual inspection without lowering yield by improving greatly marking accuracy on a defect position in comparison with a conventional technology, and by marking on a fine defect itself.SOLUTION: This defect marking device for the film includes first detection means 16, 28 for detecting a meandering amount which is a deviation in a width direction of a defect part from detection of a defect in an inspection area 37 until marking on a marking area 38, second detection means 17, 21, 23, 29 for detecting a conveyance distance of the defect part from detection of the defect in the inspection area 37 until marking on the marking area 38, and a means 25 for determining a marking position by correcting a coordinate of the defect part in the marking area 38 based on the first and second detection means. |
