发明名称 |
METHOD FOR USE IN MAKING ELECTRONIC DEVICES HAVING THIN-FILM MAGNETIC COMPONENTS |
摘要 |
Disclosed herein is a method of forming electronic device having thin-film components by using trenches. One or more of thin-film components is formed by depositing a thin-film in the trench followed by processing the deposited thin-film to have the desired thickness.
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申请公布号 |
US2011008915(A1) |
申请公布日期 |
2011.01.13 |
申请号 |
US20090500573 |
申请日期 |
2009.07.09 |
申请人 |
CROCUS TECHNOLOGY S.A. |
发明人 |
NOZIERES JEAN PIERRE;REID JASON |
分类号 |
H01L21/28 |
主分类号 |
H01L21/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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