发明名称 METHOD FOR USE IN MAKING ELECTRONIC DEVICES HAVING THIN-FILM MAGNETIC COMPONENTS
摘要 Disclosed herein is a method of forming electronic device having thin-film components by using trenches. One or more of thin-film components is formed by depositing a thin-film in the trench followed by processing the deposited thin-film to have the desired thickness.
申请公布号 US2011008915(A1) 申请公布日期 2011.01.13
申请号 US20090500573 申请日期 2009.07.09
申请人 CROCUS TECHNOLOGY S.A. 发明人 NOZIERES JEAN PIERRE;REID JASON
分类号 H01L21/28 主分类号 H01L21/28
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