发明名称 Transistor Structure
摘要 Methods of fabricating transistors and semiconductor devices and structures thereof are disclosed. In one embodiment, a method of fabricating a transistor includes forming a gate dielectric over a workpiece, forming a gate over the gate dielectric, and forming a stress-inducing material over the gate, the gate dielectric, and the workpiece. Sidewall spacers are formed from the stress-inducing material on sidewalls of the gate and the gate dielectric.
申请公布号 US2011006373(A1) 申请公布日期 2011.01.13
申请号 US20100884417 申请日期 2010.09.17
申请人 发明人 ELLER MANFRED;YAN JIANG;HAN JIN-PING;GUTMANN ALOIS
分类号 H01L27/092;H01L27/088 主分类号 H01L27/092
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