| 摘要 |
PROBLEM TO BE SOLVED: To provide a low cost ultraviolet sensor not sensitive to visible light and an ultraviolet ray of UV-A.SOLUTION: The wide gap oxide semiconductor and the ultraviolet sensor using it are configured such that a light-absorbing layer has a bandgap of at least 3.6 eV by adding aluminum oxide to zinc oxide. Thus, the ultraviolet sensor, which does not absorb light of long wavelengths such as visible light and an ultraviolet ray of UV-A and is sensitive to only ultraviolet rays of UV-B and UV-C, can be obtained at low cost. |
