| 摘要 |
PROBLEM TO BE SOLVED: To provide a photomask that expresses a large number of grayscale levels even in a gray tone mask having a binary pattern composed of a light-transmitting region and a light-shielding region.SOLUTION: The photomask includes a unit region 30, in which a plurality of small regions 20, each having a light-transmitting region 22 and a light-shielding region 24 and having an area smaller than an area corresponding to the resolution of an exposure apparatus, and the areas of the light-transmitting regions 22 or the light-shielding regions 24 being different from each other, are arranged in a combination in accordance with a grayscale level by using Bayer's matrix by a structural dither method in such a manner that the total area of the light-transmitting regions 22 or of the light-shielding regions 24 differs for each grayscale level. |
