| 摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric member for an actuator, having high piezoelectric properties such as a piezoelectric constant, hardly causing cracking or chipping even if grinding work is executed thereto, and allowing an electrode and an electrode extraction line to be formed on a surface thereof even in an unpolished state.SOLUTION: The piezoelectric member for an actuator is formed with a lead zirconate titanate-based sintered body in which: the density of the sintered body is ≥98% of theoretical density; a maximum crystal particle diameter is ≤10 μm; a maximum void diameter is ≤10 μm; surface roughness on a surface of the sintered body in an unpolished state is ≤0.3 μm in center line average roughness (Ra); a void fraction in the sintered body is ≤1.0% when an area at the depth up to 100 μm from the sintered body surface and areas other than it are assumed to be a sintered body surface layer part and a sintered body inside, respectively; and the difference between the void fraction of the sintered body surface layer part and that of the inside of sintered body is ≤1.0%. |
