| 摘要 |
Simplified patterning of conductive layers and passivation layers of a thin film is disclosed. In some embodiments, the patterning can include depositing a conductive layer onto a thin film substrate, depositing a passivation layer onto the conductive layer, applying a removable mask including a desired pattern to the passivation layer, patterning the passivation layer to have the desired pattern, using the patterned passivation layer as a mask for the conductive layer, and patterning the conductive layer to have the desired pattern. In other embodiments, the patterning can include depositing a conductive layer onto a thin film substrate, depositing a passivation layer onto the conductive layer, depositing a protective layer onto the passivation layer, applying a removable mask including a desired pattern to the protective layer, patterning the protective layer to have the desired pattern, using the patterned protective layer as a mask for the passivation and conductive layers, and patterning the passivation and conductive layers to have the desired pattern. An exemplary device utilizing the thin film so patterned can include a touch sensor panel. |
