| 摘要 |
PURPOSE: A liquid processing apparatus, a liquid processing method, and a storage media are provided to maintain the yield by preventing a processing liquid from dropping on a substrate and a substrate supporting part. CONSTITUTION: Liquid processing parts(11a to 11c) comprises a spin chuck(12a) in a cup with an opening in order to horizontally support a substrate. A resist supplying part(3) comprises a driving unit(31), an arm(33), and a collecting nozzle(40). A processing liquid nozzle is installed to a support in order to supply the processing liquid to the substrate. A nozzle bath(29) is installed to set the processing liquid nozzle to be stood by. A support driving unit moves the processing liquid nozzle. |
