| 摘要 |
PURPOSE: A union gasket for connecting a process gas discharging pipe of semiconductor process is provided to reduce the manufacturing cost by shortening the manufacturing process by forming the whole sealing member using one member. CONSTITUTION: A center disc(110) forms a pass hollow(102) having hollow shape for passing the process gas. A pipe supporting guide(120) is formed from the surface of the center disc to the connection cross section of a discharging pipe. The pipe supporting guide is inserted to the inner circumference of the discharging pipe.
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