SAMPLE CLEANING AND CONTAMINATION APPARATUS USING LOW POWER PLASMA,申请号KR20080081664-传众专利搜索

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发明名称	SAMPLE CLEANING AND CONTAMINATION APPARATUS USING LOW POWER PLASMA
摘要
申请公布号	KR101007289(B1)	申请公布日期	2011.01.13
申请号	KR20080081664	申请日期	2008.08.21
申请人		发明人
分类号	H01L21/3065	主分类号	H01L21/3065
代理机构		代理人
主权项
地址

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