发明名称 VAPORIZER
摘要 PROBLEM TO BE SOLVED: To provide a vaporizer capable of stably subliming particles of solids.SOLUTION: The vaporizer for vaporizing the particles of the solids in a solid state at ordinary temperature includes: a supply section for supplying the particles of the solids; and a vaporization section including a heating section for vaporizing the particles of the solids supplied from the supply section. The problem can be solved by providing the vaporizer where the heating section has an inclination and the particles of the solids roll on the inclination for vaporization.
申请公布号 JP2011009379(A) 申请公布日期 2011.01.13
申请号 JP20090150243 申请日期 2009.06.24
申请人 TOKYO ELECTRON LTD 发明人 FUKUMORI KOJI
分类号 H01L21/31;C23C16/448 主分类号 H01L21/31
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