DAMAGED SUBSTRATE HANDLING APPARATUS AND METHOD FOR SUBSTRATE PROCESSING SYSTEMS
摘要
<p>Embodiments of the invention generally provide apparatus and methods of handling a damaged substrate in substrate processing systems, such as screen printing systems for solar cell devices. The damaged substrate handling apparatus includes a container mounted centrally on a rotary actuator assembly. A plurality of substrate supports are arranged around the periphery of the rotary actuator assembly. Damaged substrates are transferred to the container from the substrate supports. Both automated and manual apparatus and methods are disclosed.</p>
申请公布号
WO2011003484(A1)
申请公布日期
2011.01.13
申请号
WO2009EP63031
申请日期
2009.10.07
申请人
APPLIED MATERIALS, INC.;BACCINI, ANDREA;GALIAZZO, MARCO