High-Q MEMS Gyroscope

摘要

A system and/or method for efficiently operating a MEMS gyroscope without drive circuitry and/or with drive circuitry and a non-constant oscillating amplitude. In a non-limiting example, drive circuitry may be utilized to drive the MEMS gyroscope proof mass to a desired oscillating amplitude, and then the drive circuitry may be powered off. Rotational velocity may be sensed while the proof mass is being driven to a desired oscillating amplitude, while the proof mass is being maintained at a desired oscillating amplitude, and/or while the proof mass amplitude decays.

主权项

1. A MEMS gyroscope comprising:
a proof mass; a proof mass drive circuit operable to increase an oscillation amplitude of the proof mass during a first time period and allow the oscillation amplitude of the proof mass to decrease during a second time period; and a first sense circuit operable to sense rotational velocity during at least a portion the second time period.