| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection system capable of determining a calibration position reduced in erroneous report when the wiring pattern of an ultra-multilayer printed circuit board is inspected and capable of evaluating the inspection properties thereof to estimate verification work time.SOLUTION: In the inspection system, a brightness component map seen through from an inspection surface is formed on the basis of the CAD data and layer constitution data of the respective layers constituting the multilayer printed circuit board being an inspection target. A set of the brightness components constituting the inspection surface is calculated and, after one or above brightness evaluation regions including all of sets are determined, they are imaged in an inspection device, the statistic brightness values corresponding to the respective brightness components are calculated to be substituted for the brightness component map and the optimum calibration position for determining an inspection threshold is calculated to perform inspection. |
