| 摘要 |
In this pressure-sensor chip, an annular diaphragm is provided, as a high-pressure differential-pressure diaphragm (2), so as to surround a low-pressure differential-pressure diaphragm (1). A measurement pressure (Pa) on one surface of the low-pressure differential-pressure diaphragm (1) is divided and guided to one surface of the high-pressure differential-pressure diaphragm (2), and a measurement pressure (Pb) on the other surface of the low-pressure differential-pressure diaphragm (1) is divided and guided to the other surface of the high-pressure differential-pressure diaphragm (2). This makes it possible to provide multiple differential-pressure measurement ranges. |
